李春伟;曹奇;张义;张志力;

• 1:东北林业大学
• 2:陕西威能检验咨询有限公司

摘要(Abstract)：

综述了采用磁控溅射技术和等离子体增强化学气相沉积技术制备SiOx/聚对苯二甲酸乙二醇酯(PET)薄膜的研究进展,探讨了SiOx/PET薄膜阻隔作用机理,此外还阐述了SiOx/PET薄膜的应用状况。

关键词(KeyWords)： 氧化硅;薄膜;聚对苯二甲酸乙二醇酯;磁控溅射;高阻隔

Abstract:

Keywords:

基金项目(Foundation): 中央高校基本科研业务费专项资金(DL10BB11);; 东北林业大学工程技术学院大学生创新性实验项目(CX_2011_18)

作者(Authors): 李春伟;曹奇;张义;张志力;

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