PET表面镀SiO_x薄膜的研究进展及应用Research Development and Applicationon of SiO_x Films on PET Substrate
李春伟;曹奇;张义;张志力;
摘要(Abstract):
综述了采用磁控溅射技术和等离子体增强化学气相沉积技术制备SiOx/聚对苯二甲酸乙二醇酯(PET)薄膜的研究进展,探讨了SiOx/PET薄膜阻隔作用机理,此外还阐述了SiOx/PET薄膜的应用状况。
关键词(KeyWords): 氧化硅;薄膜;聚对苯二甲酸乙二醇酯;磁控溅射;高阻隔
基金项目(Foundation): 中央高校基本科研业务费专项资金(DL10BB11);; 东北林业大学工程技术学院大学生创新性实验项目(CX_2011_18)
作者(Authors): 李春伟;曹奇;张义;张志力;
参考文献(References):
- [1]韩尔立,陈强,葛袁静,等.SiOx包装阻隔薄膜的发展现状及其制备方法[J].包装工程,2005,26(6):76-78.
- [2]Satoru Iwamori,Yumi Gotoh,Krzysztof Moorthi.Sili-con oxide gas barrier films deposited by reactive sput-tering[J].Surface and Coatings Technology,2003,166:24-30.
- [3]Lin M C,Tseng C H,Chang L S,et al.Characteriza-tion of the silicon oxide thin films deposited on poly-ethylenterephthalate substrates by radio frequency reac-tive magnetron sputtering[J].Thin Solid Films,2007,515:4 596-4 602.
- [4]Tomozeiu N,Rheiter H J H.Structure,composition,morphology and electrical properties of amorphous SiOxthin films[J].Thin Solid Films,2008,516:8 205-8209.
- [5]陈强,孙运金,周美丽,等.等离子体技术制备氧化硅阻隔层薄膜的研究[J].包装工程,2008,29(10):8-11.
- [6]刘壮,林晶,孙智慧,等.缠绕式射频磁控溅射聚酯(PET)表面沉积氧化(SiOx)薄膜的研究[J].真空科学与技术学报,2009,29(增刊):94-97.
- [7]Howells D G,Henry B M,Leterrier Y,et al.Mechani-cal properties of SiOxgas barrier coatings on polyesterfilms[J].Surface and Coatings Technology,2008,202:3 529-3 537.
- [8]Bieder A,Gondoin V,Leterrier Y,et al.Mechanicalproperties of carbon-modified silicon oxide barrier filmsdeposited by plasma enhanced chemical vapor depositionon polymer substrates[J].Thin Solid Films,2007,515:5 430-5 438.
- [9]Bieder A,Sonnenfeld A,et al.Influence of film struc-ture and composition on diffusion barrier performance ofSiOxthin films deposited by PECVD[J].Surface andCoatings Technology,2006,200:4 564-4 571.
- [10]Kim Sungryong,Choudhury Moinul Haque,KimWonho,et al.Effects of argon and oxygen flow rateon water vapor barrier properties of silicon oxidecoatings deposited on polyethylene terephthalate byplasma enhanced chemical vapor deposition[J].ThinSolid Films,2010,518:1 929-1 934.
- [11]Jin Su B,Kim Youn J,Yoon S Choi,et al.Characterization of silicon oxide gas barrier filmswith controlling to the ion current density(ion flux)by plasma enhanced chemical vapor deposition[J].Thin Solid Films,2010,518:6 385-6 385.
- [12]Singh B,Bouchet J,Rochat G,et al.Ultra-thin hy-brid organic/inorganic gas barrier coatings on poly-mers[J].Surface and Coatings Technology,2007,201:7 107-7 114.
- [13]Zhang Junfeng,Chen Qiang,Zhang Yuefei,et al.Thepower source effect on SiOxcoating deposition byplasma enhanced chemical vapor deposition[J].ThinSolid Films,2010,518:1 929-1 934.
- [14]张军峰,陈强,张跃飞.制备二氧化硅薄膜的质谱原位诊断及其特性研究[J].真空,2009,46(1):61-64.
- [15]刘玉兰,汪建华,熊礼威,等.PET材料表面制备氧化硅薄膜的研究[J].武汉工程大学学报,2010,32(5):70-73.
- [16]高俊刚,李源勋.高分子材料[M].北京:化学工业出版社,2002.
- [17]Rossi G,Nulman M.Effect of local flaws in poly-meric permeation reducing barriers[J].Journal of Ap-plied Physics,1993,74(9):5 471-5 475.
- [18]刘壮,林晶,孙智慧,等.磁控溅射陶瓷薄膜(SiOx)阻隔性机理的研究[J].包装工程,2008,29(10):12-14.