陈艳平,帅茂兵,鲜晓斌,唐贤臣,吉祥波

• 1:中国工程物理研究院

摘要(Abstract)：

采用化学气相沉积法制备的聚氯代对二甲苯(PPXC)薄膜具有优异的耐溶剂腐蚀及气体阻隔性能,其沉积聚合过程中,沉积压力对膜的结构与性能具有显著影响。采用X射线衍射(XRD)、扫描电镜(SEM)表征了不同沉积压力下制备PPXC膜的微观组织结构与形貌;采用MOCON透湿仪等测试了其水汽渗透率。结果表明,随着沉积压力升高,PPXC膜沉积速率明显增大,聚合链排列的规整程度降低,膜内无定形区,自由空间比例增大,使水汽分子在膜内的渗透更容易。

关键词(KeyWords)： 沉积压力;聚氯代对二甲苯;薄膜;结晶度;水汽渗透率

Abstract:

Keywords:

基金项目(Foundation): 表面物理与化学国家重点实验室资助项目(项目号:90000460200604)

作者(Author): 陈艳平,帅茂兵,鲜晓斌,唐贤臣,吉祥波

参考文献(References)：

• 1张征林,邵力为,徐爱群等.NiTi基C型聚对二甲苯等离子处理的表面能及生物相容性.功能材料,1999,30(6):670~672
• 2 Sim W,Kim B,Choi B,et al.Theoretical and experimentalstudies on the parylene diagrams for microdevices.Microsys-tem Technologies,2005,11(1):11~15
• 3 Satyanarayana S,McCormickb D T,Majumdar A.Parylenemicro membrane capacitive sensor array for chemical and bio-logical sensing.Sensors and Actuators,2006,115(1):494~502
• 4 Ganguli S,Agrawal H,Wang B,et al.Improved growthand thermal stability of parylene films.J Vac Sci Technol A,1997,15(6):3 138~3 142
• 5 Surendran G,Gazicki M,James W J.Polymerization ofpara-xylylene derivatives.Ⅴ.Effects of the sublimationrate of di-p-xylylene on the crystallinity of parylene c deposi-ted at different temperature.Journal of Polymer Science,1987,(25):2 089~2 106
• 6 Senkevich J J,Desu S B,Simkovic V.Temperature studiesof optical birefringence and X-ray diffraction with poly(p-xy-lylene),poly(chloro-p-xylylene)and poly(tetrafluoro-p-xy-lylene)CVD films.Polymer,2000,41:2 379~2 390
• 7张颖,王志,王世昌.高分子膜结构对气体传递的影响.高分子材料科学与工程,2004,20(4):24~27
• 8 Yeh Y S,James W J,Yasuda H.Polymerization of para-xylylene derivatives.Ⅵ.Morphology of parylene N andparylene C films investigated by gas transport characteris-tics.Jouranl of Polymer Science,1990,28:545~568
• 9 Akihiko Tanioka,Noriaki Fukushima,Koichi Hasegawa,et al.Permeation of gas across the poly(chloro-p-xylylene)membrane.Journal of Applied Polymer Science,1994,54:219~229